BROOKS SLA5800 SERIES THERMAL MASS FLOWMETER / FLOW CONTROLLER

Brooks, Thermal Mass, Flow Measurement

MODELS: SLA5850 & SLA5851 & SLA5853 / SLA5860 & SLA5861 & SLA5863
  • Wide FS flow range for measurement and control of gases from 3 sccm to 2500 lpm (N2 equivalent).
  • Accuracy <1200 lpm: ±1.0% of rate (20%-100%FS) ±0.2% FS (below 20%FS) Accuracy >1200 lpm: ±1% FS including linearity (at calibration conditions).
  • Industry leading sensor stability = Long term drift performance of <0.2% per year.
  • Digital platform with option for analog signal control

Brooks SLA5800 Series digital thermal mass flow measurement and control products offer unparalleled flexibility and performance. They offer faster response, better accuracy and improved control over traditional analog devices. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. Thermal mass flow meters & thermal mass flow controllers use thermodynamic principles to derive actual mass flow. A thermal mass flow sensor can be combined with an integral valve and PID controller in one compact, efficient instrument.

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