Measurement & Control Blog

Breakthrough Liquid Vaporization Solution

  

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Everybody knows that Brooks Instrument makes the best MFC’s and PC’s around, but do they also know that Brooks makes a remarkable direct liquid injection vaporizer?

A Brooks direct liquid injection vaporizer employs hot gas, rather than a hot metal surface, to accomplish liquid vaporization. As liquid enters the hot gas chamber, it is atomized by a carrier gas stream. Once the atomized liquid contacts the hot gas, it immediately changes to vapor. The result is chemically pure vapor, free of decomposition byproducts or liquid carry-over. Moreover, a Brooks vaporizer can accept multiple liquid inlets and will generate perfectly mixed vapors.  Unlike bubblers and hotsurface vaporizers, Brooks direct liquid injection vaporizers are extremely efficient at producing vapor from liquid.

Applications Include:

• Vaporizing liquid hydrocarbons
• Vaporizing monomers for vacuum polymer film deposition
• Water vaporization for fuel cell stack humidification and many other water addition applications
• Liquid precursor vaporization for chemical vapor deposition (CVD), metal oxide chemical vapor deposition (MOCVD), and atomic layer deposition (ALD)
• Depositing thin films for enhanced thermal, optical, or hardness characteristics such as diamond-like carbon coating and glass coating

Replace your plumber’s nightmare of a bubbler with a few, simple components and get exactly as much vapor mass as you want exactly when you want it.