BROOKS INSTRUMENT


Brooks Instrument flow technologies include coriolis flow controllers, thermal mass flow controllers, and variable area meters (rotameters). All are available in a wide range of flow measurement and flow control rates, packaging options, and communication protocols. Brooks also has a complete line of pressure regulators and pressure controllers, plus unique solutions such as vaporizer systems for many liquid vaporization applications.

THERMAL MASS | CORIOLIS MASS | COMMUNICATION TOOLS | VARIABLE AREA ROTAMETERS | POSITIVE DISPLACEMENT
LEVEL
| PRESSURE | VAPORIZER SYSTEMS

 
Thermal Mass

Thermal mass flow meters & thermal mass flow controllers use thermodynamic principles to derive actual mass flow. A thermal mass flow sensor can be combined with an integral valve and PID controller in one compact, efficient instrument.


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Brooks SLA5800

Brooks SLA5800 series digital thermal mass flow measurement and control products offer unparalleled flexibility and performance. They offer faster response, better accuracy and improved control over traditional analog devices. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime.

  • Wide FS flow range for measurement and control of gases from 3 sccm to 2500 lpm (N2 equivalent).
  • Accuracy <1200 lpm: ±1.0% of rate (20%-100%FS) ±0.2% FS (below 20%FS) Accuracy >1200 lpm: ±1% FS including linearity (at calibration conditions).
  • Industry leading sensor stability = Long term drift performance of <0.2% per year.
  • Digital platform with option for analog signal control
 


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Brooks SLAMf

Brooks SLAMf series digital thermal mass flow meter/controller products are designed specifically for use in harsh environments. These devices' unique NEMA 4X/1P65 enclosures provide protection from dust and water, making them ideal for indoor or outdoor use. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime.

  • Settling time is <1 second, and even better on request.
  • Soft start can be enabled to tailor MFC performance to process requirements.
  • Proprietary Adaptive Valve Control algorithm is available which assures that unexpected variations in process pressure do not cause flow to deviate from set point.
  • NEMA 4X/IP66 ratings afford wash down protection eliminating the need for secondary enclosures.
 

Coriolis Mass

Coriolis mass flow meters & coriolis mass flow controllers include an integrally mounted control valve in a compact miniaturized configuration. They can simultaneously measure mass flow, fluid density and temperature. QUANTIM coriolis meters, controllers and sensors provide unsurpassed performance, solving specific challenges in demanding low-flow applications.


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Brooks QUANTIM

Brooks QUANTIM next generation coriolis mass flow meter/controller provides superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid applications. QUANTIM provides flow measurement and integral control, plus on-line density and temperature measurement all in one compact package. Available with three tube sizes to match the customer's flow measurement and control needs. Available with hazardous area approvals of Class 1 Div 2 NEMA 4X/IP65 for Zone 2, and Class 1 Div 1 Group C, D for Zone 1.

  • Repeatability: ±0.05% or ±0.5 x (zero stability/flowrate) x 100% of rate whichever is greater.
  • Turn Down: 100: 1 or down to the minimum measurable flow, whichever flow rate is greater.
  • Maximum Operating Pressure:
    • Standard: 3.5 MPa, 35 bar or 500 psi
    • Optional: 10 MPa, 100 bar or 1500 psi
    • Optional: 30 MPa, 300 bar or 4500 psi (Hastelloy tube)
  • Digital platform with option for analog signal control.
 
Software / Communication Tools


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Brooks Service Suite

Brooks Service Suite digital communications software tool is a Microsoft Windows based application that provides expanded control, diagnostics and servicing capabilities for the Brooks QUANTIM Coriolis and SLA Series thermal mass flow and pressure products. The Brooks Service Suite can be used for servicing tasks that include setup, configuration, troubleshooting and tuning. The Brooks Service Suite Pro also provides access to the calibration parameters for the SLA series thermal mass flow products.

Standard Communication Functions:

  • Flow
  • Setpoint
  • Alarm Settings
  • Analog input/output (I/O) configuration & tuning
  • RS-485 settings
  • Valve tuning / flow response optimization
  • Diagnostics
 


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Brooks 0254 Secondary Electronics control unit

Brooks 0254 Secondary Electronics control unit is a microprocessor based readout and control device designed to meet the highest standards with user-friendly operation. They also provide power supply for Brooks gas/liquid thermal mass flow/pressure controllers/meters and QUANTIM coriolis mass. The readout function is a back lit 4 x 20 character display.

 

Variable Area Rotameters

Variable area rotameters are a cost-effective solution used for flow indication of liquids and gases. Brooks Instrument manufactures the worlds best.

Armored Variable Area Meters

The Brooks line of rugged metal tube variable area flow meters is ideal for high pressure, high temperature and other demanding flow applications where safety is a concern. HART and 4-20 mA outputs provide for remote flow monitoring. Models include:

MT3809G Web
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Brooks MT3809G

Brooks MT3809G is the newest armored rotameter from the Brooks arsenal of variable area rotameters. It provides accuracy of 2% FS (1% optional), and is capable of measuring high and low temperature fluids.The all metal meter is ideal for a variety of gas, liquid and steam applications.

 

  • Transmitter and alarm that meets SIL 2 requirements, the perfect product for safety applications.
  • LCD display with local operator interface without removing the cover which means changes can be made even in hazardous areas.
  • 316SS flameproof housing that meets IIC/Class 1 Div 1 to handle the toughest hazardous applications.
  • Flanged or NPT connections.
  • Weldneck flanges are standard for MT3809 and MT3810 which means full penetration welds that can easily be tested for integrity.
 

 


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Brooks MT3809E

Brooks MT3809 armored rotameters provide accuracy of 2% FS (1% optional), and are capable of measuring high and low temperature fluids. Optional 4-20mA and HART programmable microprocessor transmitters available with pulse output for totalization. Intrinsically safe or explosion-proof construction is also available.

 

  • Broad range of flow capacities.
  • Versatile construction for all gas, liquid, steam applications.
  • Operable under high temperatures and pressures.
  • Flanged or NPT connections.
  • Optional 4-20mA and HART programmable microprocessor transmitter with or without alarms and pulse output for totalization.
  • Electronics designed with either intrinsically safe or explosion proof construction to meet UL (US & Canada) ATEX certifications and CE requirements.
 


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Brooks MT3810

Brooks MT3810 armored rotameters are ideal for high pressure, high temperature and other demanding applications where safety is a concern. They provide accuracy of ±5% FS, and include flanged or female NPT connections. Optional 4-20 mA and HART programmable microprocessor transmitter available with pulse output for totalization. Intrinsically safe or explosion-proof construction is also available.

 


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Brooks MT3750

Brooks MT3750 ArMite™ armored rotameter is a reliable low-flow metal flowmeter with 5% accuracy (3% optional) constructed of 316L wetted parts. Its compact design permits installation in tight locations, and it is designed to work safely under difficult conditions. It is certified explosion-proof and intrinsically safe. Options include 4-20mA output, needle valve, flow controllers and alarms.

  • Wetted Parts made from Stainless Steel or Monel
  • Capable of measuring very low flows accurately
  • Ranges up to 26 GPH or 100 LPH
  • High Pressure and Temperature Rating
  • All non-flanged meters: 1500 psig. Optional maximum operating pressure: 4000 psig
 
Glass Tube Variable Area Meters
Available as reliable glass tube variable area meters ideal for many gas and liquid flow measuring applications where viewing the process is important. Their robust, proven engineering ensures reliable indication and unsurpassed service life.

 


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Brooks GT1000

Brooks GT1000 glass tube rotameters provide 2% FS accuracy (1% optional) in a rugged construction suitable for a wide range of applications. Its O-ring seal design minimizes process downtime by allowing for convenient in-line removal of the glass tube for cleaning and maintenance. Available with FM/CSA/NRTL/C alarms for Div 1 intrinsically safe, and Div 2 applications.

  • Flanged or NPT connections
  • Horizontal or vertical connections
  • Horizontal end fittings 360 degrees rotatable
  • Fluid resistant O-ring design allows tube removal without removal from the process piping
  • Panel mounting options available
 


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Brooks GT1100 & GT1140

Brooks GT1100 & GT1140 glass tube rotameters provide 2% FS accuracy (1% optional) in a wide variety of configurations to meet a broad range of metering applications. Its packing gland seal design provides long-term, leak-free, reliable flow measurement. Available with FM/CSA/NRTL/C alarms for Div 1 intrinsically safe, and Div 2 applications.

  • Wide choice of application-specific materials and connections
  • Reliable, externally-adjustable packing glands for ease of maintenance
  • Flanged or NPT connections with horizontal or vertical inlet and outlet orientation
  • Connections rotatable 360° at 90° intervals
 


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Brooks GT1305

Brooks GT1305 glass tube rotameter provides 10% FS accuracy (5% optional) for low-cost measurement in general installations where the operating pressure is within the limitations imposed by the use of borosilicate glass tubes. These instruments are provided with O-ring seals and can be supplied with brass or 316 SS female threaded end fittings.

  • Capacity ranges 0.8 to 50 gpm; 3 to 50 scfm
  • O-ring seal construction
  • Sturdy bolted side-plate construction
  • Vertical inlets and outlets standard, horizontal outlet with alarm
  • Alarm switch adjustable for high or low flow indication
 


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Brooks Sho-Rate 1350 and 1355 series

Brooks Sho-Rate 1350 and 1355 series of low flow indicators provides a cost-effective means of flow indication for both 10% (Model 1350) and 5% (Model 1355) accuracy requirements. Options include the integral needle control valves, as well as flow controllers on the inlet or outlet.

  • Ten-to-one rangeability
  • Wide range of scales on the metering tube with contrasting background for easy readability
  • Tubes sealed on compression gasket by threaded seal spindle
  • Interchangeable tubes and floats removable without disconnecting instrument
 

Positive Displacement


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Brooks BM Oval Gear Meters

Brooks BM Oval Gear Meters are low flow positive displacement flow meters designed for applications requiring the high accuracy measurement of clean liquids with viscosities less than 1000 Cp. Units are available with a pulse output from a Reed switch or solid state Hall effect switch for remote registration and/or totalization.

  • Sizes: 1/4" to 2” 
  • Flow Range: 0.53 GPH - 92.5 GPM
  • Accuracy: ±0.5% - 1% or better
  • Repeatability: ±0.03%
 

Level


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Brooks Model MT810

Brooks Model MT810 magnetic level gauges provide reliable liquid level measurement through the use of a proven magnetic float technology which does not require external power. As a result, plant engineers can continue to monitor material levels despite planned or unplanned power cuts. Optional alarms and transmitters are available to permit remote monitoring as well.

 

Pressure


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(5800)


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(6800)

Brooks SLA Series

Brooks SLA Series of digital thermal mass pressure measurement and control products utilize Brooks superior mass flow designs and applies them to process pressure. The SLA family of pressure controllers has options that accurately control upstream or downstream pressure. They are globally approved for use in a variety of service areas.

  • Accuracy: ±0.5% Full Scale, including linearity and hysteresis for precision control.
  • Repeatability: Integral Pressure products: ±0.1% of F.S.
  • Temperature Sensitivity: Integral Pressure products: ±0.1% of F.S. per °C
  • Pressure Ratings: Maximum Pressure: 1450 PSI / Optional Maximum Pressure: 4350 PSI
 


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(8601)

Brooks Model 8601

Brooks Model 8601 pressure regulators are high precision supply pressure regulators which are direct-acting, non-relieving units that provide bubble-tight shut-off on helium at 100 psi. Compact and economical, these units are assembled in a clean room environment and are tested under simulated operating conditions.

  • Flow capacity up to a maximum of 1000 sccm air.
  • Maximum Inlet Supply Pressure 250 psi / Maximum Working Temperature 350°F
  • Drift - Less than 1% in first fifteen minutes to total of no more than 1.5% long term
  • Supply Pressure Effect - 10 psi increase in supply will not change output more than 0.07 psi.
 



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(ss2)

SS2 PRESSURE TRANSDUCERS

The SS2 pressure transducers from Brooks Instrument, formerly Celerity, are designed for stable, accurate, and reliable pressure monitoring.

The ultra stable, micro machined silicon strain gauges are matched and fused, at high temperature to the metal diaphragm to relieve manufacturing induced stress. The process reduces "drift" (lack of zero stability) commonly associated with competitive products. Consequently, down time for zero adjustment to compensate for "drift" are exponentially reduced. In addition, the unique mechanical design eliminates the torque effects during installation.

  • Digital architecture with multiple calibration points
  • Ultimate stability and reliability
  • Class 1, Div. II area classification
  • Standard 2 year warranty
 



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(GCS400)

GCS400 CYLINDER SCALE

The Brooks GCS400 series low profile cylinder scale is designed to stand up to industry-grade abuse. A heavy gauge stainless steel housing provides superior resistance to harsh chemical and corrosive environments. The GCS400 series scale is also designed to enable the depletion of cylinder and vessel contents to the lowest possible levels, reducing your downtime and material costs.

  • Superior resistance to corrosive gases
  • Robust design withstands real-world handling
  • Heavy gauge stainless steel housing, base plate and load cell
  • Class 1, Div. I & II area classification
  • Allows cylinder and vessel depletion to lowest levels, reducing cost of ownership and increasing equipment utilization
 

Vaporizer


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Brooks Vaporizer Systems

Brooks Vaporizer Systems are used for superior direct liquid-inject vacuum film coating in processes such as Atomic Layer Deposition (ALD) and MOCVD. This system provides low temperature, gentle vaporization that produces a very pure vapor.

 


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